绾崇背姘у寲閾滭/span>姘滁/span>鍒嗘暎娑秉/span>娑傛枡澧炲己鑰愮（閿傜數姹犲寘瑕嗘潗鏂橖/span>

鏅剁憺鏂版潗鏂欐湁闄愬叕鍙伏/span>鐢樺厛鐢烖/span>186 2016 2680寰俊鍚屽彿

鍩烘湰淇℃伅锛欬/span>

CAS#锛?344-28-1

鎬ц川锛欬/span>

绾崇背姘у寲閾濆垎鏁ｆ恫鍏锋湁绾崇背绮変綋鏂欑殑鐗规€у锛孅/span>杩樺叿鏈夋洿楂樼殑娲绘€с€佹槗鍔犲叆绛夌壒鎬с€傜撼绫虫哀鍖栭摑鍒嗘暎娑蹭富瑕佺敤鍦ㄥ悇绉嶆秱鏂欙紝娌规紗锛岀數闀€锛屾垨鑰呭叾瀹冨寮鸿€愮（锛岀粷缂橀鍩烖/span>

鎶€鏈寚鏍嘃/span>

椤?nbsp; 鐩?/span>	鎸?nbsp;鏍嘃/span>	鎸?nbsp;鏍嘃/span>
鍨嬪彿	VK-L30W	VK-L20W
绾崇背姘у寲閾濆垎鏁ｆ恫澶栬	鐧借壊涔虫恫	鐧借壊涔虫恫
绾崇背姘у寲閾濆垎鏁ｆ恫骞冲潎绮掑害(nm)	20nm	30nm
绾崇背姘у寲閾濆惈閲廃/span>	20%	20%
鏅剁浉	a	y
鍒嗘暎浠嬭川	姘滁/span>	姘滁/span>
PH	7-8	7-8

绋冲畾鎬э細绾崇背姘у寲閾濇按鎬ф偓娴恫鍥犳槸杈惧埌浜嗗畬鍏ㄥ崟鍒嗘暎绾崇背鐘舵€侊紝鎵€浠ュ拰鏉愭枡琛ㄩ潰鎺ヨЕ鍚庝笉鏄櫘閫氱矇浣撴潗鏂欑殑鍚搁檮锛岃€屾槸鍜屽寲瀛﹂敭缁撳悎涓€浣擄紝鎵€浠ユ湁鏋侀珮鐨勭ǔ瀹氭€э紝鍙互鏋佸ぇ鐨勬彁楂樿€愭按娲楋紝鑰愮（銆佹姉鑿岀瓑鎬ц兘锛孅/span>

搴旂敤鑼冨洿锛欬/span>

1銆佹秱鏂欐坊鍔犲墏锛岃€愮（锛屽纭紱娑傚眰

2銆侀攤鐢垫睜鍖呰鏉愭枡

3銆佺簿鎶涘厜娑插師鏂橖/span>

4銆佸彲浠ヤ綔涓虹數闀€娴嗘枡锛岄晙闀嶏紝闀€閿岀瓑

鐢ㄩ噺锛氭帹鑽愮撼绫虫哀鍖栭摑鍒嗘暎娑茬敤閲忎负1锝濣/span>10锛咃紝浣跨敤鑰呭簲鏍规嵁涓嶅悓浣撶郴缁忚繃璇曢獙鍐冲畾娣诲姞閲忋€侟/span>

鍖呰锛欬/span>20鍏枻/妗迭/span>

绾崇背姘у寲閾濆垎鏁ｆ祮锛岀撼绫充笁姘у寲浜岄摑娴嗘枡锛岀撼绫虫哀鍖栭摑閫忔槑鍒嗘暎娑诧紝绾崇背姘у寲閾濇按鍒嗘暎娑秉/span>