1.

设备名称９�/span>

霍尔效应测试�?/span>

2.

功能描述９�/span>

测量半导体薄膜中载流子类型�?/span>载流子浓度、迁移率、电阻率、霍尔系数等参数

3.

技术参数：

3-1

测试范围９�/span>

Si� SiGe� SiC� GaAs� InGaAs� InP� GaN (N Type & P Type)等材质的半导体薄膜中载流子类型�?/span>载流子浓度、迁移率、电阻率、霍尔系数等参数

3-2

磁场９�/span>

3-2-1

磁场强度９�/span>

0.45T(等同或优于此强度)

3-2-2

磁场类型９�/span>

永磁体磁佒�/span>

3-2-3

磁场均匀性：

磁场不均匀性＜��1 %

10年内磁场变化；�/span>��0.2%

3-3

�?/span>度：

3-3-1

温度区域９�/span>

77K咋�/span>300K

3-4

电阻率范围：

1 �� Ohm*cm ~10 M Ohm*cm

3-5

电阻范围９�/span>

0.1 mOhms ~10 G Ohms

3-6

载流子浓度：

10⁷~10²¹cm^-3

3-7

迁移率：

10^-2~10⁷cm²/volt*sec

3-8

输入电流９�/span>

3-8-1

电流范围９�/span>

1000 pA~10mA

3-8-2

电流解析度：

1 pA (lowest range)

3-8-3

电流精度９�/span>

2%

3-9

输入电压９�/span>

3-9-1

电压范围９�/span>

��10V

3-9-2

电压分辨率：

1��V

4.

仪器特点９�/span>

4-1

Automatic or manual current selection

自动或手动模弎�/span>(电流控制磁场模式)

4-2

Automatic contact check

自动接触检�?/span>(欧姆接触)

4-3

Routine and enhanced software

常规和增强软仵�/span>

4-4

Differential resistivity measurements by I/V-curves

I/V曲线测试电阻率差弁�/span>

4-5

Bench top permanent magnet

永磁佒�/span>

4-6

Misalignment voltage compensation

失调电压补偿

4-7

Correction of slow sample drift voltage� especially for ZnO＋�/span>

修正慢样品漂移电压，特别是氧化锌

4-8

Automatic field calibration

自动现场标定

4-9

Large concentration and resistivity range

大浓度和电阻率范図�/span>

4-10

Flexible� modular hardware

灵活的模块化硬件

4-11

Support of various magnets� for example BioRad HL 5200

支持多样磁场

4-12

Support of various temperature controllers

支持各种温度控制�?/span>(支持客户自行升级变温系统)

4-13

Van der Pauw and bar shape (bridge-type) Hall samples

支持范德堡和霍尔巴法测试霍尔

5

硬件

5-1

The standard system consists of a bench top electronic system� a small magnet and a sample stage for room temperature and LN2 measurements.

标准系统包含电子测试系统、磁场和两个温度区域的测试平台（室温和液氮温度）

5-2

The electronics include the current source� the voltage measurement part� the contact switching module� the magnet power supply and the IEEE or RS232 interface. It is completely micro processor controlled.

电子测试系统包括由单片机控制的电流源、电压测试、接触开关模块、磁场电源�?/span>IEEE戕�/span>RS232接口

5-3

The contact switching module is designed to allow all possible measurement configurations.

接触开关模块支持所有用户用于其他的配置(用户可以采用制冷机做变温霍尔测试)

5-4

The current source has adjustable limits for voltage and/or power.{+++}

电流源具有可调电压和/或电源的限制

5-5

Voltage measurement provides different input amplifiers optimized for either low current or low voltage applications.

电压测量提供了不同的输入放大器或低电流或低电压应用的优化、�/span>

6

软件界面