技术参数：

大范围高精度扫描探针显微�安捷�?500LS

Specifications

Stage

- Standard vacuum chuck size: 150 mm

- Sample thickness: up to 35 mm

- Examination area: 150 mm x 150 mm

- Fully motorized� controlled optics

- Optical resolution: 2 ��m

Compatibility

- Compatible with Agilent 5 series family

of products and all AC modes

- Compatible with multi-purpose scanners

- Compatible with CSAFM� STM� and EFM/MFM

- Compatible with imaging in air and fluids� including but not limited to life sciences�

electrochemistry� and corrosion applications

- Compatible with temperature control (-30oC to 250oC)

S c a n n e rs

Large Scanner

- Scanning range: 100 ��m x 100 ��m

- Z range: 7 ��m

- Vertical noise: 0.5? RMS

Small Scanner

- Scanning range: 10 ��m x 10 ��m

- Z range: 2 ��m

- Vertical noise:<0.1? RMS

主要特点９�/strong>

安捷伦大样品台原子力显微镜可以快速、准确地实现针尖定位和样品定位。高精度的马达驱动能帮助您自动准确定位到您感兴趣的区域，同时带有记忆功能，可以自动迅速而准确地回到原来每个样品表面成像的位置，便于进行更多的深入研究。同�?500LS能很好地满足大样品在空气、液体和温度控制下成像、�/p>

优势

* 自动的光学缩放与聚焦，使用简单方侾�/p>

* 大范围内准确定位，分辨率优于2?m

* 150mm真空吸盘（标准），可安放6英寸晶片

* 可提�?英寸大夹具的选件，以适应更大的样品尺寷�/p>

应用

* 半导体：Si晶片、器仵�/p>

* 数据存储材料：CDs、DVDs、硬盘等筈�/p>